Detailed study of the composition of hydrogenated SiNx layers for high-quality silicon surface passivation

By H. Mäckel, R. Lüdemann. 2002

262 citations recorded by the source corpus.

Subfields: Electrical and Electronic Engineering

View Paper: https://www.semanticscholar.org/paper/2d6607ef04e033c2390719f788dd46e5742bf3ef

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In Electrical and Electronic Engineering

1. B. Richards

Citations in the corpus

• Comparison of TiO2 and other dielectric coatings for buried‐contact solar cells: a review (2004, background): “Very Si-rich films grown using silane, nitrogen and hydrogen, exhibit an extremely high refractive index of 2 8.(62) Figure 5 displays the refractive index and extinction coefficient of a range of a-SiNx:H films deposited by Nagel et al.”