A polymeric microgripper with integrated thermal actuators
By Nam-Trung Nguyen, Soon-Seng Ho, C. Low. 2004
196 citations recorded by the source corpus.
Subfields: Atomic and Molecular Physics, and Optics, Biomedical Engineering, Electrical and Electronic Engineering
View Paper: https://www.semanticscholar.org/paper/2d0bc343ef25b6d338f65daaf614a741eae0c05d
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In Biomedical Engineering
In Electrical and Electronic Engineering
Citations in the corpus
- Review of polymer MEMS micromachining (2015, background): “SU-8 can be released from silicon substrates directly [181, 184, 185].”
- Micromixers—a review (2005, unknown): “Moveable structures such as microvalves [113] and microgrippers [114] have been fabricated with the so-called polymeric surface micromachining.”