Growth, dielectric properties, and memory device applications of ZrO2 thin films

By Debashish Panda, Tseung-Yuen Tseng. 2013

265 citations recorded by the source corpus.

Subfields: Electrical and Electronic Engineering

View Paper: https://www.semanticscholar.org/paper/2c0f2388ed955b0cabc7743216dc8b6e91aa5fa7