Piezoelectric Thin Films for Sensors, Actuators, and Energy Harvesting

By Paul Muralt, Ronald Polcawich, Susan E. Trolier-McKinstry. 2009

323 citations recorded by the source corpus.

Subfields: Biomedical Engineering, Materials Chemistry

View Paper: https://www.semanticscholar.org/paper/2889db2806f9cdb878cbe86bc51064cbb0a4cc0e

How researchers see this paper

The researchers whose trusted networks rank it highest, strongest advocate first. Every researcher gets a different order.

In Biomedical Engineering

1. R. Gibson
2. S. Anton
3. Mohsen Safaei
4. Henry Sodano
5. A. Nassar
6. E. Nassar

In Materials Chemistry

1. Henry Sodano
2. R. Gibson

Citations in the corpus

• Modeling and Characterization of Piezoelectric $d_{33}$ -Mode MEMS Energy Harvester (2010, background): “First, the output voltage of the d33 mode is more sensitive to the induced vibration than that of the d31 piezoelectric mode [15], [16].”
• A review of recent research on mechanics of multifunctional composite materials and structures (2010, background): “The most widely used forms of piezoelectric materials are wafers [61] and thin films [62], and numerous publications have dealt with them over many years.”
• A review of energy harvesting using piezoelectric materials: state-of-the-art a decade later (2008–2018) (2019, background): “developing lower temperature fabrication methods and alternative substrate materials, and improving texturing of electrodes [63].”
• A Review on Piezoelectric Energy Harvesting: Materials, Methods, and Circuits (2017, unknown): “…al. 2010; Isarakorn et al. 2011; Jeon et al. 2005; Lee et al. 2009; Lei et al. 2011; Marzencki et al. 2007; Massaro et al. 2011; Miller et al. 2011; Muralt et al. 2009a; Park, Park, and Lee 2010; Roundy, Wright, and Rabaey 2003a, 2003b; Shen et al. 2008; Van Schaijk et al. 2008; Xu et al. 2012b;…”