Accurate Extraction of Large Electromechanical Coupling in Piezoelectric MEMS Resonators
By Ruochen Lu, Ming-Huang Li, Yansong Yang, T. Manzaneque, Songbin Gong. Journal of microelectromechanical systems, 2019
135 citations recorded by the source corpus.
Recent advancements in the field of piezoelectric micro-resonators have produced devices, such as lithium niobate laterally vibrating resonators, with very high electromechanical coupling factors (<inline-formula> <tex-math notation="LaTeX">$k_{t}^{2}$ </tex-math></inline-formula>) and respectable quality factors (<inline-formula> <tex-math notation="LaTeX">${Q}$ </tex-math></inline-formula>). As a result, the records of the figure of merit (FoM) for radio-frequency MEMS resonators have been broken several times in the past five years. As exciting as these high FoMs are, they impose unique caveats in accurately extracting the electromechanical coupling often due to the presence of spurious modes. It is a less noted issue for micro-resonators with moderate <inline-formula> <tex-math notation="LaTeX">${k} _{t}^{2}$ </tex-math></inline-formula>, as spurious modes either are absent or do not significantly affect the common extraction technique based on identifying resonances and anti-resonances. This paper will first theoretically analyze how disregarding spurious modes can potentially lead to inaccurate extraction of <inline-formula> <tex-math notation="LaTeX">${k} _{t}^{2}$ </tex-math></inline-formula> of the intended mode and then offer a framework that accounts for spurious modes and accurately extracts electromechanical coupling using a multi-resonance recursive fitting. [2018-0209]
Subfields: Atomic and Molecular Physics, and Optics, Biomedical Engineering, Electrical and Electronic Engineering
View Paper: https://www.semanticscholar.org/paper/27bf17d3179339fdc2acf29d9bed0e27d517218b
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Citations in the corpus
- Surface Acoustic Wave Devices Using Lithium Niobate on Silicon Carbide (2020, methodology): “The extracted static capacitance C0 and the quality factor at resonant frequency Qs (based on the multiresonance model [46]) are listed in the inset table of Fig.”
- A1 Resonators in 128° Y-cut Lithium Niobate with Electromechanical Coupling of 46.4% (2020, methodology): “Moreover, based on the eigenmode analysis, the phase velocity v p , group velocity vg , and k2 can be calculated by [35]–[37]: v p_short = 2π fshort/β, v p_open = 2π fopen/β, (1) vg_short = 2π∂ fshort/∂β, vg_open = 2π∂ fopen/∂β (2) k2 = π2/8 · [(v p_open/v p_short )2 − 1] (3)”