Fabrication of TiNi shape memory micropump

By E. Makino, Takashi Mitsuya, T. Shibata. 2001

205 citations recorded by the source corpus.

Subfields: Electrical and Electronic Engineering, Materials Chemistry

View Paper: https://www.semanticscholar.org/paper/2768927656286c376b4addaa44d8d5159e33d0ea

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In Materials Chemistry

1. Sam Zhang
2. Wenyi Huang
3. Mohsen Asghari
4. J. Musil
5. E. Taati

Citations in the corpus

• Micropumps—past, progress and future prospects (2005, background): “Common principles include piezoelectric [11–15,17,40,42] , thermopneumatic[7–10], electrostatic [18–20] and electromagnetic actuation [16,17], whereas some others, like shape memory [21] or magnetostrictive effects are rarely found.”
• TiNi-based thin films in MEMS applications: a review (2004, background): “Although freestanding TiNi film has intrinsic two-way effect, in order to maximize this effect, extra process, such as 3-D hot-shaping of TiNi film (membrane) and externally biased structure (such as a polyimide layer [70], or a bonded Si cap[29] or glass cap[71]) have often been applied.”