Comparison of tensile and bulge tests for thin-film silicon nitride

By R. Edwards, G. Coles, William N. Sharpe. 2004

149 citations recorded by the source corpus.

Subfields: Biomedical Engineering, Ceramics and Composites, Electrical and Electronic Engineering

View Paper: https://www.semanticscholar.org/paper/23f5e298a5f7be00fe0af21529477ed372cc7c76