Wireless micromachined ceramic pressure sensor for high-temperature applications

By M. Fonseca, J. English, M. Arx, Mark G. Allen. 2002

330 citations recorded by the source corpus.

Subfields: Biomedical Engineering, Electrical and Electronic Engineering

View Paper: https://www.semanticscholar.org/paper/1fa61974a40eacdabfe4f4647c47ced4717f3d8c

How researchers see this paper

The researchers whose trusted networks rank it highest, strongest advocate first. Every researcher gets a different order.

1. Li-feng Wang
2. W. Ko
3. D. Young
4. Lei Dong
5. Jiangang Du
6. C. Zorman
7. Qing‐An Huang

Citations in the corpus

• LC Passive Wireless Sensors Toward a Wireless Sensing Platform: Status, Prospects, and Challenges (2016, methodology): “They then improved the temperature to 400 °C by using low-temperature co-fired ceramics (LTCC) fabrication technology [59].”
• High-temperature single-crystal 3C-SiC capacitive pressure sensor (2004, background): “830301 are attractive for high-temperature applications because the device performance is tolerant of contact resistance variations and wireless sensing schemes can be readily realized [8], [9] to”