High-temperature single-crystal 3C-SiC capacitive pressure sensor
By D. Young, Jiangang Du, C. Zorman, W. Ko. IEEE Sensors Journal, 2004
210 citations recorded by the source corpus.
Subfields: Condensed Matter Physics, Electrical and Electronic Engineering, Mechanics of Materials
View Paper: https://www.semanticscholar.org/paper/937bd2fb847f4034a99fd7d040414949910fedd2
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In Electrical and Electronic Engineering
In Mechanics of Materials
Citations in the corpus
- High-Temperature Piezoelectric Sensing (2013, background): “Extensive research has been conducted on piezoresistive, capacitive, fiber optic, and piezoelectric sensors for high-temperature applications [7–9].”