Discharge Physics of High Power Impulse Magnetron Sputtering

By A. Anders. 2011

274 citations recorded by the source corpus.

Subfields: Computational Mechanics, Materials Chemistry, Mechanics of Materials

View Paper: https://www.semanticscholar.org/paper/1dcb549a440d145002bd4c981c73b1c2b9411dd2

How researchers see this paper

The researchers whose trusted networks rank it highest, strongest advocate first. Every researcher gets a different order.

In Computational Mechanics

1. K. Sarakinos
2. D. Lundin

In Materials Chemistry

1. D. Lundin
2. K. Sarakinos

In Mechanics of Materials

1. D. Lundin
2. K. Sarakinos

Citations in the corpus

• An introduction to thin film processing using high-power impulse magnetron sputtering (2012, background): “,(18) and Anders.(6) Furthermore, it should also be brought to the readers’ attention that parts of the current review concerning thin film processing are based on a recent review paper by Sarakinos et al.”