SU-8 thick photoresist processing as a functional material for MEMS applications

By Ewan H. Conradie, D. Moore. 2002

200 citations recorded by the source corpus.

Subfields: Atomic and Molecular Physics, and Optics, Biomedical Engineering

View Paper: https://www.semanticscholar.org/paper/1a15fb2d430d763134104c4974696225eab728ca

How researchers see this paper

The researchers whose trusted networks rank it highest, strongest advocate first. Every researcher gets a different order.

In Atomic and Molecular Physics, and Optics

1. Yongho Sungtaek Ju

In Biomedical Engineering

1. Sung Jin Kim

Citations in the corpus

• Fabrication and Characterization of the Capillary Performance of Superhydrophilic Cu Micropost Arrays (2010, background): “amplified negative-tone epoxy-based PR, recently developed to address process challenges of SU-8, including poor adhesion [15] and lack of a chemical dissolver.”