A MEMS-based piezoelectric power generator array for vibration energy harvesting

By Jingquan Liu, Hua-Bin Fang, Zheng-Yi Xu, Xinkai Mao, Xiu-Cheng Shen, Di Chen, H. Liao, B. Cai. Microelectronics Journal, 2008

499 citations recorded by the source corpus.

Subfields: Biomedical Engineering, Electrical and Electronic Engineering, Mechanical Engineering

View Paper: https://www.semanticscholar.org/paper/18db929fd3ca2403b4712bc252775165d6e63ce4

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In Biomedical Engineering

In Electrical and Electronic Engineering

In Mechanical Engineering

Citations in the corpus

MEMS Vibration Energy Harvesting Devices With Passive Resonance Frequency Adaptation Capability (2009, methodology): “This principle has also been presented by Liu et al. [ 16 ].”
A review of vibration-based MEMS piezoelectric energy harvesters (2011, methodology): “Schematic configuration of a single cantilever beam [18].”
Nonlinear Behavior of an Electrostatic Energy Harvester Under Wide- and Narrowband Excitation (2010, unknown): “[10], [11].”
Toward Broadband Vibration-based Energy Harvesting (2010, methodology): “The test was carried out at an acceleration level of 50 g, which was much higher than 0.5 g in the test conducted by Liu et al. (2008).”
Piezoelectric Energy Harvesting Solutions (2014, background): “Another approach is to enlarge the bandwidth by fabricating an array of cantilevers with different natural frequencies [43,93].”
A review of energy harvesting using piezoelectric materials: state-of-the-art a decade later (2008–2018) (2019, methodology): “Various piezoelectric MEMS energy harvesting designs including (a) thin-film PZT cantilever (reprinted from [244], Copyright 2005, with permission from Elsevier), (b) high aspect ratio beam (reprinted from [245], Copyright 2006, with permission from Elsevier), (c) cantilever array (reprinted from [2”
A new S-shaped MEMS PZT cantilever for energy harvesting from low frequency vibrations below 30 Hz (2012, background): “However, most reported piezoelectric MEMS energy harvesters have high resonant frequencies (normally above 200 Hz) (Renaud et al. 2008; Liu et al. 2008; Shen et al. 2009; Elfrink et al. 2009; Lee et al. 2009; Park et al. 2010) or require high acceleration levels (normally above 1g).”
Piezoelectric MEMS generators fabricated with an aerosol deposition PZT thin film (2009, background): “On the other hand, Liu et al [19] reported an arrayed MEMS power generator that can increase the total power output by a multi-beam configuration.”
A review on energy harvesting approaches for renewable energies from ambient vibrations and acoustic waves using piezoelectricity (2017, methodology): “Because, most of the ambient vibration sources vibrates in the low frequency range, Liu et al [57] proposed a harvester array based on a thick-film piezoelectric cantilever which can operates at low frequency range.”
Survey on broadband techniques for vibration energy harvesting (2013, methodology): “Figure 8(a) and (b) shows the power generator presented by Liu et al. (2008).”