Introduction to microfabrication

By S. Franssila. 2004

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An AlN MEMS Piezoelectric Microphone for Aeroacoustic Applications (2012, background): “Customization of the stress state is achieved via adjustment of bias power, argon pressure, sputtering gas mass, temperature, and/or deposition rate [32].”
Engineering microscale topographies to control the cell–substrate interface (2012, methodology): “This technique is widely used to generate rigid microstructures on inorganic materials such as silicon and silicon oxide [39,40].”