Silicon carbide as a new MEMS technology

By P. Sarro. 2000

421 citations recorded by the source corpus.

Subfields: Electrical and Electronic Engineering, Materials Chemistry

View Paper: https://www.semanticscholar.org/paper/16536335a3ef5aa1f0e7344ad687dca05e717162

How researchers see this paper

The researchers whose trusted networks rank it highest, strongest advocate first. Every researcher gets a different order.

In Electrical and Electronic Engineering

1. Hoang‐Phuong Phan
2. Sima Dimitrijev
3. Dzung Viet Dao
4. Debbie G. Senesky
5. A. Pisano
6. K. Nakamura
7. Nam-Trung Nguyen
8. Jeff Morse

In Materials Chemistry

1. Hoang‐Phuong Phan
2. Sima Dimitrijev
3. Dzung Viet Dao
4. Debbie G. Senesky
5. K. Nakamura
6. Nam-Trung Nguyen

Citations in the corpus

• Harsh Environment Silicon Carbide Sensors for Health and Performance Monitoring of Aerospace Systems: A Review (2009, background): “This is due to its attractive electrical and mechanical properties as well as chemical stability [7]–[10].”
• The Piezoresistive Effect of SiC for MEMS Sensors at High Temperatures: A Review (2015, methodology): “3C-SiC on Si platform more compatible with conventional MEMS processes which have been well established for Si [21], [66], [67].”
• Silicon carbide color centers for quantum applications (2020, neutral): “the microelectromechanical system (MEMS) applications [33].”