MEMS and NEMS - systems, devices, and structures

By S. Lyshevski. IEEE Electrical Insulation Magazine, 2004

208 citations recorded by the source corpus.

Subfields: Biomedical Engineering

View Paper: https://www.semanticscholar.org/paper/11c3eaeab4c72c48f7da74c3cf12b2fe148a3db9

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In Biomedical Engineering

1. Hongbo Sun
2. Satoshi Kawata
3. Kincho H. Law
4. Thomas W. Kenny
5. Jerome P. Lynch
6. S. Park

Citations in the corpus

• Two-photon photopolymerization and 3D lithographic microfabrication (2005, methodology): “Electrically controlling micro systems, the requirement of MEMS, is most desirable, however, there is a long way to go before introducing conductive polymer into structures and integrating polymer devices on an IC-contained semiconductor chip or developing polymer ICs.”
• Design of Piezoresistive MEMS-Based Accelerometer for Integration with Wireless Sensing Unit for Structural Monitoring (2003, background): “Oxidation of silicon renders silicon surfaces chemically and electronically stable (Lyshevski 2002).”