Some design considerations on the electrostatically actuated microstructures
By Yuh-Chung Hu, C. M. Chang, Shiuh-Jer Huang. 2004
208 citations recorded by the source corpus.
Subfields: Atomic and Molecular Physics, and Optics, Biomedical Engineering, Electrical and Electronic Engineering
View Paper: https://www.semanticscholar.org/paper/11c35a3d13ac409347c89a40dbcd6472e6713044
How researchers see this paper
The researchers whose trusted networks rank it highest, strongest advocate first. Every researcher gets a different order.
In Atomic and Molecular Physics, and Optics
- Yin Zhang
- Wenming Zhang
- Ghader Rezazadeh
- Guang Meng
- Hamed Sadeghian
- Peter M. Osterberg
- Ya-pu Zhao
- Romesh C. Batra
In Biomedical Engineering
In Electrical and Electronic Engineering
- Yin Zhang
- Wenming Zhang
- Ghader Rezazadeh
- Guang Meng
- Hamed Sadeghian
- Peter M. Osterberg
- Ya-pu Zhao
- Romesh C. Batra
Citations in the corpus
- Numerical and Analytical Study on the Pull-in Instability of Micro-Structure under Electrostatic Loading (2006, methodology): “As demonstrated by Hu et al. [ 18 ], there is significant computational difference on the pull-in voltage between lumped model and modal expansion method (Galerkin method) and the experimental results match the results of Galerkin method very well.”
- Nonlinear Dynamic Analysis of Electrostatically Actuated Resonant MEMS Sensors Under Parametric Excitation (2007, methodology): “[20] investigated the resonances of electrostatically actuated microcantilever, while the coupled modes parametric resonance was demonstrated in [21].”
- Application of the Generalized Differential Quadrature Method to the Study of Pull-In Phenomena of MEMS Switches (2007, methodology): “Specifically, the cantilever beam’s pull-in results predicted from the proposed GDQM algorithm are compared with the results predicted in [27].”