High-/spl kappa//metal-gate stack and its MOSFET characteristics

By R. Chau, S. Datta, M. Doczy, Brian Doyle, J. Kavalieros, M. Metz. IEEE Electron Device Letters, 2004

380 citations recorded by the source corpus.

Subfields: Electrical and Electronic Engineering

View Paper: https://www.semanticscholar.org/paper/0f570d4d98d997f5eb822ebbd073982473905df6

How researchers see this paper

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In Electrical and Electronic Engineering

1. Wei Dang Lu
2. Ping Xie
3. Charles M. Lieber
4. Peidong Yang
5. F. Patolsky
6. Gengfeng Zheng
7. Wei Cai
8. K. Kang

Citations in the corpus

• Nanowire Transistor Performance Limits and Applications (2008, background): “71 mA/μm reported in state-of-the-art, sub100 nm silicon p-MOSFETs employing high-κ dielectrics [84].”