Dry etching of polydimethylsiloxane for microfluidic systems

By J. Garra, T. Long, J. Currie, Thomas D. Schneider, Robert I. White, M. Paranjape. 2002

190 citations recorded by the source corpus.

Subfields: Biomedical Engineering

View Paper: https://www.semanticscholar.org/paper/0d54a1ab13d8dae32939fb2ca125c2a63a9fea1a

How researchers see this paper

The researchers whose trusted networks rank it highest, strongest advocate first. Every researcher gets a different order.

In Biomedical Engineering

1. T. Adrega
2. Hyung-Kew Lee
3. Stéphanie P. Lacour
4. Sun-Il Chang
5. Euisik Yoon
6. Herbert Shea
7. Samuel Rosset

Citations in the corpus

• A Flexible Polymer Tactile Sensor: Fabrication and Modular Expandability for Large Area Deployment (2006, methodology): “It was reported that PDMS is etched well with 3:1 CF O gas in RIE before [ 20 ], but we used SF and achieved a similar result.”
• Stretchable gold conductors embedded in PDMS and patterned by photolithography: fabrication and electromechanical characterization (2010, background): “The etching plasma is stricken at 20 ◦C and a chamber pressure of 20 mtorr, with 50 sccm SF6, 2000 W ICP power and 13 W RF bias power (figure 1(i)) [16].”