Applications of atomic layer deposition to nanofabrication and emerging nanodevices

By Hyungjun Kim, Han‐Bo‐Ram Lee, W. Maeng. 2009

566 citations recorded by the source corpus.

Subfields: Biomedical Engineering, Electrical and Electronic Engineering, Materials Chemistry

View Paper: https://www.semanticscholar.org/paper/0ca9a60f931e9ac6cd5e1ebc81f6a246d95f5528

Citations in the corpus

• Flexible electronics under strain: a review of mechanical characterization and durability enhancement strategies (2016, unknown): “Considerable effort has also being directed toward designing ALD reactions that are R2R compatible [149].”