Crystallinity of inorganic films grown by atomic layer deposition: Overview and general trends

By V. Miikkulainen, Markku Leskelä, Mikko Ritala, Riikka L. Puurunen. 2013

1,304 citations recorded by the source corpus.

Subfields: Electrical and Electronic Engineering, Materials Chemistry

View Paper: https://www.semanticscholar.org/paper/0b5c2e266676038ea2e15fa8b8857d11c76dfa2f