A high-precision, wide-bandwidth micromachined tunneling accelerometer

By Cheng-Hsien Liu, Thomas W. Kenny. 2001

185 citations recorded by the source corpus.

Subfields: Atomic and Molecular Physics, and Optics, Biomedical Engineering, Electrical and Electronic Engineering

View Paper: https://www.semanticscholar.org/paper/073559b02427baf89a7ae37a7cb73c8a35323767