Micromachined flow-through filter-chamber for chemical reactions on beads
By H. Andersson, Wouter van der Wijngaart, P. Enoksson, Göran Stemme. 2000
155 citations recorded by the source corpus.
Subfields: Biomedical Engineering, Electrical and Electronic Engineering
View Paper: https://www.semanticscholar.org/paper/0694662492b30a5dd118e8fa93cb632b5b096adf
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In Biomedical Engineering
In Electrical and Electronic Engineering
Citations in the corpus
- A microreactor for hydrogen production in micro fuel cell applications (2004, unknown): “The catalyst particles are trapped in the microchannels by a filter [4] near the microreformer outlet, formed using deep-reactive ion etching (DRIE) of silicon.”
- Lab-on-chip technologies: making a microfluidic network and coupling it into a complete microsystem—a review (2007, methodology): “(1) Deep reactive ion etching process; (2) a fluidic vortex diode machined by DRIE [LAAS] [53]; (3) effect of the passivation/etching cycle on a profile [KTH] [54], © 2000, with permission from Elsevier.”
- Silicon Porosification: State of the Art (2010, background): “322 The sidewall roughness can be reduced by shortening the duration of the etching and passivation steps 300 or by post processing: thermal oxidation followed by oxide etching, 323 or annealing in a hydrogen atmosphere at high temperature 324 reduces the size of the scallops.”