Rare-earth oxide thin films for gate dielectrics in microelectronics

By Markku Leskelä, K. Kukli, Mikko Ritala. 2006

139 citations recorded by the source corpus.

Subfields: Electrical and Electronic Engineering, Materials Chemistry

View Paper: https://www.semanticscholar.org/paper/057a6c07ea507ad417f69720cfc0ce47cf773909