Area-Selective Deposition: Fundamentals, Applications, and Future Outlook

By G. Parsons, R. Clark. Chemistry of Materials, 2020

279 citations recorded by the source corpus.

This article provides an overview of area-selective thin film deposition (ASD) with primary focus on vapor-phase thin film formation via chemical vapor deposition (CVD) and atomic layer deposition ...

Subfields: Electrical and Electronic Engineering, Materials Chemistry

View Paper: https://www.semanticscholar.org/paper/0086e2de1d405ff82b78ee05b2debeb64c8bc14d