Standing wave and skin effects in large-area, high-frequency capacitive discharges

By M. Lieberman, J. Booth, Pascal Chabert, J. Rax, M. Turner. 2002

316 citations recorded by the source corpus.

Subfields: Electrical and Electronic Engineering

View Paper: https://www.semanticscholar.org/paper/ffdb9f02917e31a45fb6bac959de11fc312424ed