Nanofabrication by scanning probe microscope lithography: A review

By Ampere A. Tseng, A. Notargiacomo, Tupei Chen. 2005

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Tailoring the atomic structure of graphene nanoribbons by scanning tunnelling microscope lithography. (2008, background): “STM combines the capability of atomic-resolution imaging with the ability to locally modify the surface of the sample”
The rise of graphene. (2007, methodology): “For the time being, to make proof-of-principle nanometre-size devices, one can use electrochemical etching of graphene by scanning-probe nanolithograph”
Applications of dip-pen nanolithography. (2007, positive): “Among these, scanning probe microscope-based lithographies (SPLs) offer both ultrahigh resolution and in situ imaging capabilities, and as such, these techniques are actively used as nanofabrication tool”
Review on Micro- and Nanolithography Techniques and Their Applications (2012, background): “Scanning probe lithography utilizes a sharp probe in an atomic force microscope (AFM) to heat, scratch, oxidize or transfer substances to the surface of a substrate for patterning nanoscale features [34-38].”