The mechanical and biocompatibility properties of DLC-Si films prepared by pulsed DC plasma activated chemical vapor deposition
By A. Bendavid, P. Martin, C. Comte, E. Preston, A. Haq, F. Ismail, R. Singh. 2007
137 citations recorded by the source corpus.
Subfields: Materials Chemistry, Mechanics of Materials
View Paper: https://www.semanticscholar.org/paper/feacd955be950f0754997f687095a5ba3e6cd75f
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In Materials Chemistry
Citations in the corpus
- An updated overview of diamond-like carbon coating in tribology (2015, methodology): “Schematic diagram of different deposition techniques (A) ion beam deposition technique,(1) (B) magnetron sputtering,(74) (C) plasma immersion ion implantation and deposition ioint, and (D) plasma activated chemical vapor deposition.(75) 96 K.”