Investigation of the local structure of LiPON thin films to better understand the role of nitrogen on their performance

By B. Fleutot, B. Pecquenard, H. Martínez, M. Letellier, A. Levasseur. 2011

150 citations recorded by the source corpus.

Subfields: Electrical and Electronic Engineering

View Paper: https://www.semanticscholar.org/paper/fdd132a5e20be40fce25a4491149bc1e52b79220