Silicon microring resonators with 1.5-μm radius

By Qianfan Xu, David Fattal, Raymond G. Beausoleil. 2008

505 citations recorded by the source corpus.

We demonstrate a junction between a silicon strip waveguide and an ultra-compact silicon microring resonator that minimizes spurious light scattering and increases the critical dimensions of the geometry. We show cascaded silicon microring resonators with radii around 1.5 µm and effective mode volumes around 1.0 µm3 that are critically coupled to a waveguide with coupled Q’s up to 9,000. The radius of 1.5 µm is smaller than the operational wavelength, and is close to the theoretical size limit of the silicon microring ring resonator for the same Q. The device is fabricated with a widely-available SEM-based lithography system using a stitch-free design based on a U-shaped waveguide.

Subfields: Atomic and Molecular Physics, and Optics, Electrical and Electronic Engineering

View Paper: https://www.semanticscholar.org/paper/fd8faf5f1965dd57ff291cfd9c1ed4092d6f7144

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In Atomic and Molecular Physics, and Optics

In Electrical and Electronic Engineering

Citations in the corpus

Silicon-based on-chip multiplexing technologies and devices for Peta-bit optical interconnects (2014, methodology): “Furthermore, when using MRRs as tunable optical filters, optical modulators, optical switches, etc, the size reduction is also helpful to reduce the power consumption, which is directly proportional to the circumference [59].”
Resolving the thermal challenges for silicon microring resonator devices (2014, methodology): “5 μ m in radius [10], and when used in conjunction with the free-carrier dispersion effect [11], well into Ghz-rate bandwidth.”
RF Photonics: An Optical Microcombs’ Perspective (2018, background): “98), allows tight mode confinement within compact device footprints of 10’s to 100’s of microns [88]–[90] which, when combined with a high Kerr nonlinear coefficient (n2 ≈ 6 × 10−18 m2 W−1), yields extremely high nonlinear parameters (γ) of up to ∼300 000 W−1 km−1 [76].”