Silicon piezoresistive stress sensors and their application in electronic packaging

By J. Suhling, R. Jaeger. IEEE Sensors Journal, 2001

286 citations recorded by the source corpus.

Subfields: Atomic and Molecular Physics, and Optics, Electrical and Electronic Engineering

View Paper: https://www.semanticscholar.org/paper/fd47a2c18701934c33ddea578795a8aa28e16af4