Properties of titanium nitride films prepared by direct current magnetron sputtering

By Y. L. Jeyachandran, S. Narayandass, D. Mangalaraj, S. Areva, J. Mielczarski. 2007

164 citations recorded by the source corpus.

Subfields: Condensed Matter Physics, Materials Chemistry, Mechanics of Materials

View Paper: https://www.semanticscholar.org/paper/fcdb5d3f0ca1c2f1b8ff2d59618622477d557d8a