High-Q micromechanical resonators in a two-dimensional phononic crystal slab
By S. Mohammadi, A. Eftekhar, W. Hunt, A. Adibi. 2009
262 citations recorded by the source corpus.
Subfields: Biomedical Engineering, Electronic, Optical and Magnetic Materials
View Paper: https://www.semanticscholar.org/paper/fbeeb7ecd32c7aea1f0a272a4d3d3828ac46dfc4
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In Biomedical Engineering
Citations in the corpus
- MEMS Resonators for Frequency Reference and Timing Applications (2020, methodology): “Anchor losses can also be reduced by anchoring the MEMS resonators using PnC tethers [95], [159]–[163].”
- Dynamic modulation of photonic crystal nanocavities using gigahertz acoustic phonons (2011, methodology): “Moreover, our technique is not limited to piezoelectric substrates but can be readily adopted on arbitrary platforms, most noteworthy silicon, by using piezoelectric coupling layers for SAW excitatio”