High quality factor photonic crystal nanobeam cavities

By P. Deotare, M. Mccutcheon, I. Frank, M. Khan, Marko Loncar. 2009

494 citations recorded by the source corpus.

We investigate the design, fabrication, and experimental characterization of high quality factor photonic crystal nanobeam cavities in silicon. Using a five-hole tapered one-dimensional photonic crystal mirror and precise control of the cavity length, we designed cavities with theoretical quality factors as high as 1.4×107. By detecting the cross-polarized resonantly scattered light from a normally incident laser beam, we measure a quality factor of nearly 7.5×105. The effect of cavity size on mode frequency and quality factor was simulated and then verified experimentally.

Subfields: Atomic and Molecular Physics, and Optics, Electrical and Electronic Engineering, Surfaces, Coatings and Films

View Paper: https://www.semanticscholar.org/paper/fb991a1e859a03813b19e1ebc49b427e805e1578

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In Atomic and Molecular Physics, and Optics

In Electrical and Electronic Engineering

In Surfaces, Coatings and Films

Citations in the corpus

Aluminum nitride as a new material for chip-scale optomechanics and nonlinear optics (2012, methodology): “region is enclosed between tapered PhC Bragg mirrors, in which the primary lattice constant of the PhC is tapered down parabolically towards a secondary, smaller lattice constant in the cavity region [31]. The cavity is patterned into a free-standing AlN nanobeam with a height of 330 nm. Using a fin”
Cavity-enhanced second-harmonic generation via nonlinear-overlap optimization (2015, background): “, ring resonators [17,21–23] and nanobeam cavities [19,24], our designs ensure frequencymatching and small confinement factors, while simultaneously maximizing the SHG enhancement factor Q(2)1Q2jβ̄j(2) to yield orders of magnitude improvements in the nonlinear coupling β̄ described by Eq.”
Exciton–polariton light–semiconductor coupling effects (2011, background): “Except for the relatively new micropillar and nanobeam arrangemen”
A fiber-coupled diamond quantum nanophotonic interface (2016, unknown): “PCCs enable high optical Q factors while retaining wavelength-scale mode volumes [46], a key ingredient enabling strong light-matter interactions [11,13].”