Diagnostics of inductively coupled chlorine plasmas: Measurement of Cl2+ and Cl+ densities

By M. V. Malyshev, N. Fuller, K. Bogart, V. Donnelly, I. Herman. 2000

138 citations recorded by the source corpus.

Subfields: Electrical and Electronic Engineering, Mechanics of Materials, Spectroscopy

View Paper: https://www.semanticscholar.org/paper/fb6dbf356fa72db8e683d0b8a14daabac2a8e193