Thermal Stability and Performance of NbSiTaTiZr High-Entropy Alloy Barrier for Copper Metallization

By Ming-Hung Tsai, Chun Wen Wang, Che-Wei Tsai, W. Shen, Jien‐Wei Yeh, J. Gan, Wen‐Wei Wu. 2011

197 citations recorded by the source corpus.

Subfields: Aerospace Engineering, Mechanical Engineering

View Paper: https://www.semanticscholar.org/paper/fb22c872430b2e519f6eb0fed18d4796a829d995

How researchers see this paper

The researchers whose trusted networks rank it highest, strongest advocate first. Every researcher gets a different order.

In Aerospace Engineering

  1. M. Grądzka-Dahlke
  2. Marzena Tokarewicz
  3. Nick Birbilis
  4. H. Fraser
  5. Sebastian Thomas
  6. Ming-Hung Tsai
  7. Y. Qiu
  8. D. Fabijanic

In Mechanical Engineering

  1. M. Grądzka-Dahlke
  2. Marzena Tokarewicz
  3. Sebastian Thomas
  4. Nick Birbilis
  5. H. Fraser
  6. Ming-Hung Tsai
  7. Y. Qiu
  8. D. Fabijanic

Citations in the corpus