Three-dimensional micromachining of glass using femtosecond laser for lab-on-a-chip device manufacture

By Koji Sugioka, Ya Cheng, K. Midorikawa. 2005

185 citations recorded by the source corpus.

Subfields: Biomedical Engineering, Computational Mechanics

View Paper: https://www.semanticscholar.org/paper/f987aaa4a0cf948b0ab36a8f4f3d4a4755e442c0

How researchers see this paper

The researchers whose trusted networks rank it highest, strongest advocate first. Every researcher gets a different order.

In Biomedical Engineering

1. Eli Simova
2. R. Taylor
3. Cyril Hnatovsky

In Computational Mechanics

1. R. Taylor
2. Cyril Hnatovsky
3. Eli Simova

Citations in the corpus

• Applications of femtosecond laser induced self‐organized planar nanocracks inside fused silica glass (2008, methodology): “This approach has been applied to make microchannels [24] and nano-wells [25] directly in fused silica and photostructurable glasses with an additional step involving heat treatment [26].”
• Progress in ultrafast laser processing and future prospects (2017, unknown): “This two-step procedure results in the formation of 3D microfluidic structures inside glass such as photosensitive glass [96, 98, 99] and fused silica [84, 100].”