Magnetron sputtering: a review of recent developments and applications

By P. Kelly, R. Arnell. 2000

1,835 citations recorded by the source corpus.

Subfields: Aerospace Engineering, Materials Chemistry, Mechanics of Materials

View Paper: https://www.semanticscholar.org/paper/f8debe1fdf438d7c78b3f230c9339dcb1b4b7e46

How researchers see this paper

The researchers whose trusted networks rank it highest, strongest advocate first. Every researcher gets a different order.

In Aerospace Engineering

1. A. González‐Elipe
2. Á. Barranco
3. A. Borrás
4. A. Palmero

In Materials Chemistry

1. A. González‐Elipe
2. Á. Barranco
3. A. Borrás
4. A. Palmero

In Mechanics of Materials

1. Marcello Cabibbo
2. A. González‐Elipe
3. E. Santecchia
4. Á. Barranco
5. Farayi Musharavati
6. A. Borrás
7. Erfan Zalnezhad
8. A. Palmero

Citations in the corpus

• Perspectives on oblique angle deposition of thin films: From fundamentals to devices (2016, methodology): “Owing to its high efficiency, reliability and scalability, this technique is widely used industrially [138].”