Thin film deposition with physical vapor deposition and related technologies

By S. Rossnagel. 2003

224 citations recorded by the source corpus.

Subfields: Electrical and Electronic Engineering, Mechanics of Materials, Surfaces, Coatings and Films

View Paper: https://www.semanticscholar.org/paper/f72ca374bfe0f8f042ad5d6ed45371d006d662e6