Mechanical characterization of Lipon films using nanoindentation

By E. Herbert, W. Tenhaeff, N. Dudney, G. Pharr. 2011

143 citations recorded by the source corpus.

Subfields: Electrical and Electronic Engineering, Materials Chemistry, Mechanics of Materials

View Paper: https://www.semanticscholar.org/paper/f6fc59b604f4aebb8d91b13891b268f994ff7e78

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In Electrical and Electronic Engineering

  1. W. Carter
  2. Y. Chiang
  3. T. Swamy
  4. Giovanna Bucci
  5. Da Deng

In Materials Chemistry

  1. Y. Chiang
  2. Giovanna Bucci

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