Microsensors, microelectromechanical systems (MEMS), and electronics for smart structures and systems

By Vijay K. Varadan, V. Varadan. 2000

143 citations recorded by the source corpus.

Subfields: Atomic and Molecular Physics, and Optics, Biomedical Engineering, Electrical and Electronic Engineering

View Paper: https://www.semanticscholar.org/paper/f64a6ec69521e2d33e3da6216443572d32b54114