Gas-assisted focused electron beam and ion beam processing and fabrication

By I. Utke, P. Hoffmann, J. Melngailis. 2008

1,001 citations recorded by the source corpus.

Subfields: Computational Mechanics, Electrical and Electronic Engineering, Surfaces, Coatings and Films

View Paper: https://www.semanticscholar.org/paper/f5f0670a331b621a539ca72c8045c53080471c55

How researchers see this paper

The researchers whose trusted networks rank it highest, strongest advocate first. Every researcher gets a different order.

In Computational Mechanics

1. Michael Huth
2. Fabrizio Porrati
3. O. Dobrovolskiy

In Electrical and Electronic Engineering

1. P. J. Schuck
2. Michael Huth
3. Eli Yablonovitch
4. Ming C Wu
5. Stefano Cabrini
6. Tae Joon Seok
7. M. Staffaroni
8. Jeffrey Bokor

In Surfaces, Coatings and Films

1. Michael Huth
2. Fabrizio Porrati
3. O. Dobrovolskiy

Citations in the corpus

• Nanofocusing in a metal–insulator–metal gap plasmon waveguide with a three-dimensional linear taper (2012, background): “12 the scan time, the thicker the deposited oxide layer) and electron-high-tension (EHT) voltage of the electron gun (the lower the EHT voltage, the thicker the deposited oxide layer) [7].”
• Focused electron beam induced deposition meets materials science (2017, methodology): “Following this goal setting, this review will give a brief introduction into the basics of FEBID (see [2, 23] for a comprehensive overview) and will then, in particular, address recent developments in the fabrication of all-metal FEBID structures, discuss FEBID approaches to direct-write superconduc”