Tribology of MEMS

By M. P. Boer, T. Mayer. 2001

164 citations recorded by the source corpus.

Subfields: Atomic and Molecular Physics, and Optics, Materials Chemistry, Mechanics of Materials

View Paper: https://www.semanticscholar.org/paper/f5b9cab797d1301cc495ba93da255052dc29d65e

How researchers see this paper

The researchers whose trusted networks rank it highest, strongest advocate first. Every researcher gets a different order.

In Atomic and Molecular Physics, and Optics

1. T. Jacobs
2. Robert W. Carpick
3. Bernd Gotsmann
4. Mark A. Lantz

In Materials Chemistry

1. T. Jacobs
2. Robert W. Carpick
3. Bernd Gotsmann
4. Mark A. Lantz

In Mechanics of Materials

1. T. Jacobs
2. Robert W. Carpick
3. Bernd Gotsmann
4. Mark A. Lantz

Citations in the corpus

• On the Application of Transition State Theory to Atomic-Scale Wear (2010, background): “Already, microelectromechanical systems (MEMS) with gears or other sliding contacts demonstrate unacceptably low lifetimes due to wear; such issues are exacerbated as dimensions shrink into the nanometer scale [1–3].”