Characterization and reduction of microfabrication-induced decoherence in superconducting quantum circuits
By C. Quintana, A. Megrant, Z. Chen, A. Dunsworth, B. Chiaro, R. Barends, B. Campbell, Yu Chen, I. Hoi, Evan Jeffrey and 11 more. 2014
134 citations recorded by the source corpus.
Many superconducting qubits are highly sensitive to dielectric loss, making the fabrication of coherent quantum circuits challenging. To elucidate this issue, we characterize the interfaces and surfaces of superconducting coplanar waveguide resonators and study the associated microwave loss. We show that contamination induced by traditional qubit lift-off processing is particularly detrimental to quality factors without proper substrate cleaning, while roughness plays at most a small role. Aggressive surface treatment is shown to damage the crystalline substrate and degrade resonator quality. We also introduce methods to characterize and remove ultra-thin resist residue, providing a way to quantify and minimize remnant sources of loss on device surfaces.
Subfields: Artificial Intelligence, Atomic and Molecular Physics, and Optics, Electrical and Electronic Engineering
View Paper: https://www.semanticscholar.org/paper/f44ca504dba468beb7396090a21f825512ab3eee
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In Artificial Intelligence
In Atomic and Molecular Physics, and Optics
In Electrical and Electronic Engineering
Citations in the corpus
- Materials challenges and opportunities for quantum computing hardware (2021, background): “Interface cleaning such as O2 plasma etching or weak-ion milling before metal deposition improves the quality factors of Al superconducting resonators on sapphire (97).”