Aspects of scanning force microscope probes and their effects on dimensional measurement

By A. Yacoot, Ludger Koenders. 2008

166 citations recorded by the source corpus.

Subfields: Atomic and Molecular Physics, and Optics, Biomedical Engineering, Mechanics of Materials

View Paper: https://www.semanticscholar.org/paper/f3fdc5346f35c6088919766c9619e986db2171e0