MEMS flow sensors for nano-fluidic applications

By Shuyun Wu, Qiao Lin, Y. Yuen, Yu-Chong Tai. Proceedings IEEE Thirteenth Annual International Conference on Micro Electro Mechanical Systems (Cat. No.00CH36308), 2000

190 citations recorded by the source corpus.

Subfields: Biomedical Engineering, Mechanical Engineering

View Paper: https://www.semanticscholar.org/paper/f37e6bc74a5e1164ee8ee9b1d3e2703de14de383

How researchers see this paper

The researchers whose trusted networks rank it highest, strongest advocate first. Every researcher gets a different order.

1. Yasin Orooji
2. Fatemeh Ejeian
3. A. Razmjou
4. Shohreh Azadi
5. M. Asadnia
6. M. Warkiani
7. A. Kottapalli

Citations in the corpus

• Design and applications of MEMS flow sensors: A review (2019, background): “Wu and co-workers develped a MEMS thermal flow sensor that measured liquid flow rate n the range of nanolitre per minute [42].”