Piezoelectric nanoelectromechanical resonators based on aluminum nitride thin films

By R. Karabalin, M. Matheny, Xiaohua Feng, E. Defay, G. Rhun, C. Marcoux, Sebastien Hentz, P. Andreucci, Michael L. Roukes. 2009

176 citations recorded by the source corpus.

Subfields: Atomic and Molecular Physics, and Optics, Biomedical Engineering, Electrical and Electronic Engineering

View Paper: https://www.semanticscholar.org/paper/f31df486a8cd3467cc4f551a76f2b0a57621146f