Thin-film bulk acoustic resonators and filters using ZnO and lead-zirconium-titanate thin films

By Q. Su, P. Kirby, E. Komuro, Masaaki Imura, Qi Zhang, R. Whatmore. 2001

158 citations recorded by the source corpus.

Subfields: Biomedical Engineering, Materials Chemistry, Mechanics of Materials

View Paper: https://www.semanticscholar.org/paper/f316de32a7be8e07ec0741e3433f06cd0935649d

How researchers see this paper

The researchers whose trusted networks rank it highest, strongest advocate first. Every researcher gets a different order.

In Biomedical Engineering

1. Songbin Gong
2. Gianluca Piazza

Citations in the corpus

• Design and Analysis of Lithium–Niobate-Based High Electromechanical Coupling RF-MEMS Resonators for Wideband Filtering (2013, background): “In the last decade, piezoelectric thin film resonators, such as thin film bulk acoustic-wave resonators (FBARs) [1], [2] and solid mounted resonators (SMRs) [3], have successfully demonstrated the capability of forming duplexers, owning to the high and high of the AlN films.”