Ca test of Al2O3 gas diffusion barriers grown by atomic layer deposition on polymers

By P. Carcia, R. S. Mclean, M. Reilly, M. Groner, S. George. 2006

425 citations recorded by the source corpus.

Subfields: Electrical and Electronic Engineering

View Paper: https://www.semanticscholar.org/paper/f2cd7be7cad4cc9e128893e4fb7b80b166347232

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  1. J. Kwon
  2. K. Choi
  3. Seonil Kwon
  4. Sung‐Min Lee

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