Mo/Si Multilayers with Different Barrier Layers for Applications as Extreme Ultraviolet Mirrors

By S. Braun, H. Mai, M. Moss, R. Scholz, A. Leson. 2002

135 citations recorded by the source corpus.

Subfields: Computational Mechanics, Mechanics of Materials, Surfaces, Coatings and Films

View Paper: https://www.semanticscholar.org/paper/f29baca1dffbfa3ea4c48461e1ed08afb41e24de