A large vertical displacement electrothermal bimorph microactuator with very small lateral shift
By Lei Wu, Huikai Xie. 2008
160 citations recorded by the source corpus.
This paper reports a novel electrothermal actuator design that can generate large vertical displacements with almost no lateral shift. The lateral-shift-free (LSF) piston motion is achieved by using a unique three-bimorph actuation mechanism. Both micromirrors and microlens holders based on this new actuator design have been fabricated using a combined surface- and bulk-micromachining process. A 0.62 mm vertical displacement is measured at only 5.3 V for a fabricated 0.8 mm by 0.8 mm micromirror, and both the lateral shift (10 μm) and tilting angle (0.7°) are very small in that full vertical displacement range. The measured resonant frequency of the vertical motion mode is about 0.5 KHz. The thermal response time is about 25 ms.
Subfields: Atomic and Molecular Physics, and Optics, Electrical and Electronic Engineering
View Paper: https://www.semanticscholar.org/paper/f27c65c45f84313e809c57f17c0faa9b16f6e724
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In Atomic and Molecular Physics, and Optics
In Electrical and Electronic Engineering
Citations in the corpus
- A Review of Phased Array Steering for Narrow-Band Electrooptical Systems (2009, methodology): “Wu et al. demonstrated an electrothermal micromirror that has a mirror size of > 1.0 mm and a response time of about 3 ms, as shown in Fig. 23 [ 90 ].”